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electrothermal sensing

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1atomic force microscope 1electrostatic actuation 1frequency modulation 1linearity 1microelectromechanical systems 1microelectromechanical systems (MEMS) 1piezoelectric selfsensing

1Fowler, Anthony G. 1Maroufi, Mohammad 1Mohammadi, Ali 1Ruppert, Michael G. 1Yuce, Mehmet Rasit

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12012 12017

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1No 1Yes

1atomic force microscope 1electrostatic actuation 1frequency modulation 1linearity 1microelectromechanical systems 1microelectromechanical systems (MEMS) 1piezoelectric selfsensing

1Fowler, Anthony G. 1Maroufi, Mohammad 1Mohammadi, Ali 1Ruppert, Michael G. 1Yuce, Mehmet Rasit

Date

12012 12017

1Adobe Acrobat PDF

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On-chip dynamic mode atomic force microscopy: a silicon-on-insulator MEMS approach

- Ruppert, Michael G., Fowler, Anthony G., Maroufi, Mohammad, Moheimani, S. O. Reza

Creator: Ruppert, Michael G. , Fowler, Anthony G. , Maroufi, Mohammad , Moheimani, S. O. Reza
Resource Type: journal article
Date: 2017

On-chip dynamic mode atomic force microscopy: a silicon-on-insulator MEMS approach

Creator: Ruppert, Michael G. , Fowler, Anthony G. , Maroufi, Mohammad , Moheimani, S. O. Reza
Resource Type: journal article
Date: 2017

Frequency modulation technique for MEMS resistive sensing

- Mohammadi, Ali, Yuce, Mehmet Rasit, Moheimani, S. O. Reza

Creator: Mohammadi, Ali , Yuce, Mehmet Rasit , Moheimani, S. O. Reza
Resource Type: journal article
Date: 2012

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